Sensor yothamanga ya semiconductor yomwe imagwiritsidwa ntchito nthawi zambiri imagwiritsa ntchito N-mtundu wa silicon wafer ngati gawo lapansi. Choyamba, chowotcha cha silicon chimapangidwa kukhala gawo lokhala ndi kupsinjika ndi geometry inayake. Pa gawo lokhala ndi nkhawa la chowotcha cha silicon, zopinga zinayi zamtundu wa P zimapangidwa motsatira njira zosiyanasiyana za kristalo, ndiyeno mlatho wa Wheatstone wa mikono inayi umapangidwa ndi zopinga zinayi izi. Pansi pa mphamvu yakunja, kusintha kwa mfundo zotsutsa kumakhala zizindikiro zamagetsi. Mlatho wa wheatstone uwu wokhala ndi mphamvu yokakamiza ndi mtima wa sensor yokakamiza, yomwe nthawi zambiri imatchedwa mlatho wa piezoresistive (monga momwe tawonetsera pa Chithunzi 1). Makhalidwe a mlatho wa piezoresistive ndi motere: ① kukana kwa mikono inayi ya mlatho ndi ofanana (onse r0); ② Mphamvu ya piezoresistive ya mikono yoyandikana ndi mlatho ndi yofanana ndi mtengo wake komanso mosiyana ndi chizindikiro; ③ Kutentha kwa kutentha kwa mikono inayi ya mlatho ndikofanana, ndipo nthawi zonse kumakhala kutentha komweko. Mu mkuyu. 1, R0 ndi mtengo wokana popanda kupsinjika ndi kutentha; RT ndi kusintha komwe kumachitika chifukwa cha kutentha kwa kutentha (α) pamene kutentha kumasintha; Υ Rδ ndi kusintha kwa kukana komwe kumachitika chifukwa cha kupsyinjika (ε); Mphamvu yotulutsa mlatho ndi u=I0 Δ Rδ=I0RGδ (mlatho wokhazikika wapano).

Kumene I0 imakhala yokhazikika pakali pano ndipo e ndi magetsi osasintha. Mphamvu yamagetsi ya mlatho wa piezoresistive imagwirizana mwachindunji ndi vuto (ε) ndipo ilibe kanthu kochita ndi RT chifukwa cha kutentha kwa kutentha kwa kukana, komwe kumachepetsa kwambiri kutentha kwa sensa. Chomwe chimagwiritsidwa ntchito kwambiri pa semiconductor pressure sensor ndi sensor yozindikira kuthamanga kwamadzi. Mapangidwe ake akuluakulu ndi capsule yopangidwa ndi silicon monocrystalline (monga momwe tawonetsera pa Chithunzi 2). Diaphragm imapangidwa kukhala kapu, ndipo pansi pa chikho ndi gawo lomwe limanyamula mphamvu yakunja, ndipo mlatho wopondereza umapangidwa pansi pa chikhocho. Chovala cha mphete chimapangidwa ndi zinthu zomwezo za silicon single crystal, kenako diaphragm imamangiriridwa ku pedestal. Sensa yamtunduwu ili ndi ubwino wokhudzika kwambiri, voliyumu yaying'ono ndi kulimba, ndipo yakhala ikugwiritsidwa ntchito kwambiri pa ndege, kuyendetsa mlengalenga, zida zamagetsi ndi zida zamankhwala.