Semiconductor pressure sensors ikhoza kugawidwa m'magulu awiri, imodzi imachokera ku mfundo yakuti I-υ makhalidwe a semiconductor PN junction (kapena schottky junction) amasintha pansi pa kupsinjika maganizo.Kuchita kwa chinthu chovuta kwambiri ichi ndi chosakhazikika ndipo sichinapangidwe kwambiri.Wina ndi sensa yochokera ku semiconductor piezoresistive effect, yomwe ndi mitundu yayikulu ya semiconductor pressure sensor.M'masiku oyambilira, ma semiconductor strain gauges nthawi zambiri amamangiriridwa ku zinthu zotanuka kuti apange zida zosiyanasiyana zoyezera kupsinjika ndi zovuta.M'zaka za m'ma 1960, ndi chitukuko cha teknoloji yophatikizika ya semiconductor, semiconductor pressure sensor yokhala ndi diffusion resistor monga piezoresistive element idawonekera.Sensa yamtunduwu imakhala ndi mawonekedwe osavuta komanso odalirika, palibe magawo osuntha wachibale, ndipo chinthu chovuta kwambiri komanso zotanuka za sensa zimaphatikizidwa, zomwe zimapewa kupumira kwa makina ndi kukwawa ndikuwongolera magwiridwe antchito a sensa.

Piezoresistive zotsatira za semiconductor Semiconductor ali ndi mawonekedwe okhudzana ndi mphamvu yakunja, ndiko kuti, resistivity (yoyimiridwa ndi chizindikiro ρ) imasintha ndi kupsinjika komwe kumakhala nako, komwe kumatchedwa piezoresistive effect.Kusintha kwapang'onopang'ono kwa resistivity pansi pa mphamvu ya unit kumatchedwa piezoresistive coefficient, yomwe imawonetsedwa ndi chizindikiro π.Amawonetsedwa masamu ngati ρ/ρ = π σ.

Kumene σ akuyimira kupsinjika.Kusintha kwa mtengo wotsutsa (R / R) chifukwa cha kukana kwa semiconductor pansi pa kupsinjika kumatsimikiziridwa makamaka ndi kusintha kwa resistivity, kotero kufotokozera kwa piezoresistive effect kungalembedwenso kuti R / R = πσ.

Pansi pa mphamvu yakunja, kupsinjika kwina (σ) ndi kupsyinjika (ε) kumapangidwa mu makristalo a semiconductor, ndipo mgwirizano pakati pawo umatsimikiziridwa ndi Young's modulus (Y) ya zinthu, ndiko kuti, Y=σ/ε.

Ngati mphamvu ya piezoresistive ikuwonetsedwa ndi zovuta pa semiconductor, ndi R / R = Gε.

G imatchedwa sensitivity factor of pressure sensor, yomwe imayimira kusintha kwamphamvu kwa kukana pansi pa zovuta za unit.

Piezoresistive coefficient kapena sensitivity factor ndiye gawo lofunikira la semiconductor piezoresistive effect.Ubale pakati pawo, monga ubale pakati pa kupsinjika ndi kupsinjika, umatsimikiziridwa ndi modulus ya Young pazinthu, ndiko kuti, g = π y.

Chifukwa cha anisotropy of semiconductor crystals mu elasticity, Young's modulus ndi piezoresistive coefficient coefficient kusintha ndi crystal orientation.Kukula kwa semiconductor piezoresistive effect kumagwirizananso kwambiri ndi resistivity ya semiconductor.Kutsika kwa resistivity, ndi kucheperako kwa sensitivity factor.Mphamvu ya piezoresistive ya kukana kwa diffusion imatsimikiziridwa ndi kuyang'ana kwa kristalo ndi ndende yonyansa ya kukana kufalikira.Kuchuluka kwa chidetso kumatanthawuza kuchuluka kwa chidebe chapamwamba cha kusanjikizako.