Imagwira pa Passat mafuta wamba njanji kuthamanga kachipangizo 06E906051K

1. Njira yopangira sensor sensor, yomwe ili:

Kupereka gawo lapansi la semiconductor, momwe gawo loyamba la dielectric la interlayer, gawo loyamba la dielectric la interlayer ndi lachiwiri la dielectric layer limapangidwa pagawo la semiconductor.

Mbali yotsika ya elekitirodi mu gawo loyamba la dielectric wosanjikiza, maelekitirodi oyamba omwe ali pagawo lofanana ndi mbale yapansi ya elekitirodi ndikusiyanitsidwa.

Kulumikiza zigawo;

Kupanga gawo la nsembe pamwamba pa mbale yapansi ya polar;

Kupanga mbale yapamwamba ya elekitirodi pagawo loyamba la dielectric la interlayer, gawo loyamba lolumikizirana ndi gawo lansembe;

Pambuyo kupanga wosanjikiza nsembe ndi pamaso kupanga chapamwamba mbale, mu woyamba interconnection wosanjikiza

Kupanga poyambira kugwirizana, ndi kudzaza poyambira kugwirizana ndi chapamwamba mbale kulumikiza magetsi ndi woyamba cholumikizira wosanjikiza; Kapena,

Pambuyo kupanga chapamwamba ma elekitirodi mbale, kulumikiza grooves aumbike mu chapamwamba electrode mbale ndi woyamba interconnection wosanjikiza, amene

Kupanga conductive wosanjikiza kulumikiza chapamwamba ma elekitirodi mbale ndi woyamba interconnection wosanjikiza mu poyambira kugwirizana;

Pambuyo magetsi kulumikiza mbale chapamwamba ndi woyamba interconnection wosanjikiza, kuchotsa nsembe wosanjikiza kupanga patsekeke.

2. Njira yopangira sensor yokakamiza molingana ndi kudzinenera 1, momwe mu gawo loyamba

Njira yopangira gawo la nsembe pa interlayer dielectric layer ili ndi izi:

Kuyika zinthu zosanjikiza zansembe pagawo loyamba la dielectric la interlayer;

Kupanga chitsanzo cha zinthu zoperekedwa nsembe kuti zikhale gawo la nsembe.

3. Njira yopangira makina osindikizira molingana ndi zomwe akunena 2, momwe photolithography ndi engraving zimagwiritsidwa ntchito.

Mtundu wa zinthu zoperekedwa nsembe umatsatiridwa ndi etching process.

4. Njira yopangira sensor yokakamiza molingana ndi zomwe akuti 3, momwe gawo la nsembe

Zinthu zake ndi amorphous carbon kapena germanium.

5. Njira yopangira sensor yokakamiza molingana ndi zonena 4, momwe gawo la nsembe

Zinthu zake ndi amorphous carbon;

Mpweya wotsekemera womwe umagwiritsidwa ntchito popanga zinthu zosanjikiza zansembe umaphatikizapo O2, CO, N2 ndi Ar;

Zomwe zimagwiritsidwa ntchito popanga zinthu zoperekera nsembe ndi izi: kuchuluka kwa O2 ndi 18 SCCM ~ 22 SCCM, ndipo kuchuluka kwa CO ndi 10%.

Kuthamanga kumachokera ku 90 SCCM kufika ku 110 SCCM, kuthamanga kwa N2 kumachokera ku 90 SCCM mpaka 110 SCCM, ndi kuthamanga kwa Ar.

Mitunduyi ndi 90 SCCM ~ 110 SCCM, kuthamanga kwapakati ndi 90 mtor ~ 110 mtor, ndipo mphamvu yokondera ndi

540w ~ 660w.