Kupanikizika kwa injini 2CP3-68 1946725 kwa Carter excavator

Njira yokonzekera sensor yothamanga, yodziwika ndi izi:

S1, yopereka chowotcha chokhala ndi kumbuyo komanso kutsogolo;Kupanga mzere wa piezoresistive ndi malo olumikizirana kwambiri kutsogolo kwa mtanda;Kupanga kupanikizika kwakuya pabowo pokhomerera kumbuyo kwa chophimba;

S2, kumangiriza pepala lothandizira kumbuyo kwa chofufumitsa;

S3, kupanga mabowo otsogolera ndi mawaya achitsulo kumbali yakutsogolo kwa chophatikizira, ndikulumikiza mizere ya piezoresistive kupanga mlatho wa Wheatstone;

S4, kuika ndi kupanga passivation wosanjikiza pamwamba pamwamba pa yopyapyala, ndi kutsegula gawo passivation wosanjikiza kupanga zitsulo pad dera.2. Njira yopangira makina osindikizira molingana ndi 1, momwe S1 imaphatikizapo ndondomeko zotsatirazi: S11: kupereka chofufumitsa chokhala ndi kumbuyo kumbuyo ndi kutsogolo, ndikufotokozera makulidwe a filimu yowonongeka pazitsulo;S12: Kuyika kwa ion kumagwiritsidwa ntchito kutsogolo kwa chofufumitsa, mizere ya piezoresistive imapangidwa ndi njira yotenthetsera kutentha kwambiri, ndipo madera olumikizana amakhala ndi doped kwambiri;S13: kuyika ndi kupanga wosanjikiza woteteza kutsogolo kwa chofufumitsa;S14: kutchingira ndi kupanga chibowo chakuya chakumbuyo kwa chophatikizira kuti apange filimu yovutirapo.3. Njira yopangira makina osindikizira molingana ndi 1, momwe chofufumitsa ndi SOI.

Mu 1962, Tufte et al.anapanga kachipangizo kakang'ono ka piezoresistive ndi mizere yosakanikirana ya silicon piezoresistive ndi mawonekedwe a filimu ya silicon kwa nthawi yoyamba, ndipo anayamba kufufuza pa piezoresistive pressure sensor.Chakumapeto kwa zaka za m'ma 1960 ndi kumayambiriro kwa zaka za m'ma 1970, maonekedwe a matekinoloje atatu, omwe ndi teknoloji ya silicon anisotropic etching, teknoloji ya ion implantation ndi teknoloji yogwirizanitsa anodic, inabweretsa kusintha kwakukulu kwa kachipangizo kameneka, komwe kunathandiza kwambiri pakuchita bwino. .Kuyambira m'ma 1980, ndi chitukuko chowonjezereka cha teknoloji ya micromachining, monga anisotropic etching, lithography, diffusion doping, ion implantation, kugwirizana ndi kuyanika, kukula kwa sensa yamagetsi yakhala ikuchepetsedwa mosalekeza, kukhudzidwa kwakhala bwino, ndipo zotsatira zake ndi zazikulu. magwiridwe antchito ndi abwino kwambiri.Pa nthawi yomweyo, chitukuko ndi kugwiritsa ntchito teknoloji yatsopano ya micromachining imapangitsa kuti makulidwe a filimuyo azitha kuyendetsedwa bwino.