Oyenera Hitachi KM11 mafuta pressure sensor EX200-2-3-5

Matekinoloje anayi a pressure sensor sensor

1. Wothandizira

ma capacitive pressure sensors nthawi zambiri amakondedwa ndi kuchuluka kwa ntchito zaukadaulo za OEM. Kuzindikira kusintha kwa capacitance pakati pa malo awiri kumathandizira masensa awa kuti amve kutsika kwambiri komanso kuchuluka kwa vacuum. Pakasinthidwe kathu ka sensa, nyumba yophatikizika imakhala ndi zitsulo ziwiri zotalikirana, zofananira komanso zotalikirana ndi magetsi, imodzi mwazomwe zimakhala diaphragm yomwe imatha kupindika pang'ono. Malo okhazikika awa (kapena mbale) amayikidwa kuti kupindika kwa msonkhano kusinthe kusiyana pakati pawo (kwenikweni kupanga chosinthira chosinthika). Kusintha kotsatiraku kumadziwika ndi dera lofananirako laling'ono (kapena ASIC), lomwe limakulitsa ndikutulutsa chizindikiro chapamwamba kwambiri.

2.CVD mtundu

Chemical vapor deposition (kapena "CVD") njira yopanga zomangira polysilicon wosanjikiza ku chitsulo chosapanga dzimbiri diaphragm pamlingo wa mamolekyulu, motero imapanga sensa yokhala ndi magwiridwe antchito anthawi yayitali. Njira zopangira ma semiconductor wamba zimagwiritsidwa ntchito popanga milatho ya polysilicon strain gauge yogwira ntchito bwino pamtengo wokwanira. Mapangidwe a CVD ali ndi magwiridwe antchito abwino kwambiri ndipo ndiye sensor yotchuka kwambiri pamapulogalamu a OEM.

3. Sputtering filimu mtundu

Kuyika filimu ya sputtering (kapena "filimu") kumatha kupanga sensa yokhala ndi mzere wophatikizika kwambiri, hysteresis ndi kubwerezabwereza. Kulondola kumatha kufika pa 0.08% ya sikelo yonse, pomwe kusuntha kwanthawi yayitali kumakhala kotsika ngati 0.06% ya sikelo yonse chaka chilichonse. Kuchita modabwitsa kwa zida zazikulu-sensa yathu yopyapyala yamakanema ndi chuma mumakampani ozindikira kukakamizidwa.

Mtundu wa 4.MMS

Masensawa amagwiritsa ntchito diaphragm ya micro-machined silicon (MMS) kuti azindikire kusintha kwamphamvu. Silicon diaphragm imasiyanitsidwa ndi sing'anga ndi 316SS yodzazidwa ndi mafuta, ndipo amachita motsatizana ndi kuthamanga kwamadzimadzi. Sensa ya MMS imatenga ukadaulo wamba wopangira semiconductor, womwe umatha kukwaniritsa kukana kwamagetsi apamwamba, mzere wabwino, magwiridwe antchito abwino kwambiri otenthetsera komanso kukhazikika mu phukusi la sensa yaying'ono.