Kapangidwe ka Piezoresistive Sensor

Mu sensa iyi, mzere wotsutsa umaphatikizidwa pa monocrystalline silicon diaphragm ndi njira yophatikizira kupanga silicon piezoresistive chip, ndipo mbali ya chip iyi imayikidwa mu chipolopolo, ndipo ma electrode amatsogolera kunja. Piezoresistive pressure sensor, yomwe imadziwikanso kuti solid-state pressure sensor, ndi yosiyana ndi yomatira yamagetsi, yomwe imafunika kumva mphamvu yakunja mosadukiza kudzera muzinthu zotanuka, koma imamva mwachindunji kupanikizika komwe kumayesedwa kudzera pa silicon diaphragm.

Mbali imodzi ya silicon diaphragm ndi malo othamanga kwambiri omwe amalumikizana ndi kuthamanga kwake, ndipo mbali inayo ndi malo otsika kwambiri omwe amalumikizana ndi mlengalenga. Kawirikawiri, diaphragm ya silicon imapangidwa ngati bwalo lokhala ndi zozungulira zokhazikika, ndipo chiŵerengero cha m'mimba mwake mpaka makulidwe ndi pafupifupi 20 ~ 60. Mizere inayi ya kukana zonyansa P imagawidwa m'deralo pa diaphragm yozungulira ya silicon ndikugwirizanitsa mu mlatho wathunthu, awiri mwa iwo. ali m'malo opanikizika opanikizika ndipo ena awiri ali m'malo opanikizika, omwe ali ofananira pakati pa diaphragm.

Kuphatikiza apo, palinso masikweya a silicon diaphragm ndi silicon column sensor. Silicon cylindrical sensor imapangidwanso ndi mizere yopingasa pofalikira mbali ina ya ndege ya crystal ya silinda ya silicon, ndipo mizere iwiri yolimbana ndi kupsinjika ndi mizere iwiri yolimbana ndi kupsinjika imapanga mlatho wathunthu.

Sensor ya piezoresistive ndi chipangizo chopangidwa ndi kukana kwa diffusion pa gawo lapansi la zinthu za semiconductor malinga ndi piezoresistive zotsatira za semiconductor material. Gawo lake laling'ono likhoza kugwiritsidwa ntchito mwachindunji ngati sensa yoyezera, ndipo kukana kufalikira kumalumikizidwa mu gawo lapansi mwa mawonekedwe a mlatho.

Pamene gawo lapansi likupundutsidwa ndi mphamvu yakunja, zotsutsana zidzasintha ndipo mlatho udzatulutsa linanena bungwe losagwirizana. Magawo (kapena ma diaphragms) omwe amagwiritsidwa ntchito ngati masensa a piezoresistive amakhala makamaka ma silicon wafer ndi ma germanium wafers. Ma silicon piezoresistive masensa opangidwa ndi ma silicon wafers monga zida zovutirapo akopa chidwi kwambiri, makamaka ma sensor olimba a state piezoresistive poyezera kuthamanga ndi kuthamanga ndi omwe amagwiritsidwa ntchito kwambiri.