Kapangidwe ka seezoressist sensor

Mu sensor iyi, chingwe chotsutsanacho chimaphatikizidwa pa conocrystalline silicon diaphragm ndikuphatikizidwa kuti chip azikhala chipolopolo, ndipo ma elekitirode amatsogolera amatsogozedwa. Ponenor wopanikizika, womwe umadziwika kuti ndi sensor yolimba, ndiyosiyana ndi mawonekedwe a strain, omwe akuyenera kumva kukakamiza kwakunja kudzera mwa zinthu zotsekereza, koma mwachindunji kumapanikizika ndi Silicon Diaphragm.

Mbali imodzi ya silicran Diaphragm ndi mphamvu yayitali yolumikizidwa ndi kukakamizidwa koyesedwa, ndipo mbali inayo ndikukakamizidwa polumikizana ndi thambo. Nthawi zambiri, diicon diaphragm imapangidwa ngati bwalo lokhazikika, ndipo kuchuluka kwa mizere yosiyanasiyana ndi yolumikizana ndi zigawo ziwiri, zomwe zimagwirizana ndi ulemu kwa diaphragm.

Kuphatikiza apo, palinso gawo lalikulu silicon diaphragm ndi silicon Column Sensor. Sensor ya silican cylindrical imapangidwanso chifukwa chogwirizana ndi mizere inayake ya silicon cylinder, ndi kupsinjika kwamatumbo awiri otsutsana ndi zoponderezedwa.

Sensor sensor ndi chida chopangidwa ndi cholumikizira pokana gawo lapansi la semiconductor kukhazikika malinga ndi zotsatira za Pinondurestem ya sechector ya semoni. Gawo lake limatha kugwiritsidwa ntchito mwachindunji ngati sensor yoyezera, ndipo kusokonezeka kumalumikizidwa mu gawo la mlatho.

Pamene gawo lapansi litasokonekera ndi mphamvu yakunja, mfundo zotsutsana zidzasintha ndipo mlatho udzapanga zofananira. Pulogalamu (kapena diaphragms) zogwiritsidwa ntchito ngati zisuzi zowoneka bwino ndizachikazi ndi Germanium Warrs. Ma sensa a Sucton Pizzores opangidwa ndi apicton ofewetsa ngati zinthu zokopa zomwe zimakopa chidwi kwambiri, makamaka zowoneka bwino zama piezorestive zoyeserera ndikuthana ndi kuthamanga.